2007
1 Control of Micro- and Nanostructure in Transition Metal Nitrides, International Conference on Metallurgical Coatings and Thin Films, April 2007, San Diego
2. Instructor: Short course on materials characterization of thin films, International Conference on Metallurgical Coatings and Thin Films, April 2007, San Diego
3. Instructor: Advanced Materials Characterization Workshop, University of Illinois, May 23, 2007
4 Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion, International Surface Engineering Workshop, Eighth Sheffield ABS Days, July 23-24, 2007, Sheffield, United Kingdom
5 Advances in materials nanocharacterization, 14th international conference on Vacuum, Electron, and Ion Technology, Varna, Bulgaria, September, 2007
6 Atomistic processes during energetic deposition and etching studied by LEEM and STM, International AVS Symposium October 14-19, 2007, Seattle, WA, USA
7 Control of Microstructure during Reactive Sputter Deposition, "The Symposium on Reactive Sputter Deposition" Leoben University, Austria, December 6-7, 2007
Advances in materials nanocharacterization, Caterpillar, Peoria Illinois, April 20, 2006
Advances in materials nanocharacterization, Mechanical and Industrial Engineering, University of Illinois, USA, November 29, 2005
Advances in materials nanocharacterization, Physics Department Seminar, University of Toledo, USA, November 17, 2005
Advances in materials nanocharacterization, 14th international conference on Vacuum, Electron, and Ion Technology, Varna, Bulgaria, September, 2005
Dynamics of Materials Revealed by Electron Microscopy, Midwest Microscopy and Microanalysis Society, University of Illinois, USA, June 2005
Fundamentals of Thin Film Growth, Linköping University, Sweden, February 17, 2005
Control of nanostructure evolution in metastable transition metal nitride layers using high-flux, low-energy ion irradiation during growth, 51th AVS international symposium, Anaheim, USA, Nov.14, 2004
(PLENARY) “Control of nanostructure evolution in metastable transition metal nitride layers using high-flux, low-energy ion irradiation during growth”, George W. Keulks Symposium on Nanotechnology, University of Wisconsin – Milwaukee, October 15, 2004
Seeing atoms: modern analytical techniques underpinning materials science, Illinois Association of Chemistry Teachers Conference IACT 2004, Illinois State University, Normal, Illinois, October 8, 2004
Control of microstructure evolution during film growth, 50th AVS international symposium, Baltimore, USA, Nov.2 2003
(PLENARY) Advances in materials nanocharacterization, European Nationals Science Foundation Workshop, Sofia, Bulgaria, Sept. 22-24, 2003
Novel, self-assembled nanostructures in metastable transition-metal nitride layers formed under high-flux, low-energy ion irradiation during growth, 13th international conference on Vacuum, Electron, and Ion Technology, Varna, Bulgaria, September, 2003
Fundamentals of Thin Film Growth, Uppsala University, Sweden, October 25, 2002
Novel, self-assembled nanostructures in metastable transition-metal nitride layers formed under high-flux, low-energy ion irradiation during growth, 36th IUVSTA Workshop on the mechanisms of formation and applications of hard nanostructured coatings , Plzen, Czech Republic, October 20-24, 2002
Development of Texture in Polycrystalline in Transition-Metal Nitride Layers Grown by Reactive Magnetron Sputtering: Role of Low-Energy Ion/Surface Interactions, ISI2002 International Workshop on "Effect of ions in layer growth", Balatonvilágos (Lake Balaton) Hungary, 9-11 September 2002.
(PLENARY) Growth, microstructure, and properties of metastable transition-metal nitrides: d-TaNx, Ti1-xCexN, Ti1-xYxN, International Surface Engineering Workshop, Eighth Sheffield ABS Days, July 23-24, 2002, Sheffield, United Kingdom.
Petrov, S. Kodambaka, P. Desjardins, A. Vailionis, V. Petrova, D. Cahill and J.E. Greene, , "Microstructural and Surface Morphological Evolution at the Atomic Scale during the Growth of Polycrystalline TiN: a HR-TEM, XRD, STM, and Modeling Study," IUVSTA Workshop on Selective and Functional Film Deposition Technologies as Applied to ULSI Technology, Mie, Japan, November 19-24, 2000
Ivan Petrov, C.-S. Shin, D. Gall, S.
Kodambaka, and J.E. Greene,
Growth and Properties of Epitaxial Transition
Metal Nitrides: CrN, TaN and ScN,
Surface Engineering Workshop, Sixth Sheffield
ABS Days, United Kingdom, July 25-26, 2000
Petrov, (PLENARY) Microstructure Development in Thin Hard Coatings, Mikkeli International Industrial Coating Seminar, March 16-18. 2000, Finland
Ivan Petrov,
C.-S. Shin, D. Gall, S. Kodambaka, and J.E. Greene, Epitaxial Growth and
Properties of Transition Metal Nitrides, Mikkeli International Industrial
Coating Seminar, March 16-18. 2000, Finland
“Microstructural and Surface Morphological Evolution at the Atomic
Scale during the Growth of Polycrystalline TiN: a TEM, XRD, HT-STM, and
Modeling Study” 46th AVS international Symposium, Seattle, USA,
October
25-29, 1999
(PLENARY) 11th
International School on Vacuum, Electron, and Ion Technology, Varna, Bulgaria,
September 20-25, 1999
EPITAXIAL GROWTH AND
PROPERTIES OF TRANSITION METAL NITRIDES: ScN, CrN AND TaN , 11th
IUVSTA International Conference on Thin Films,
August
30- September 3, 1999 Cancun, México
Thin Films and Surface Science at the DOE Electron-Beam Microcharacterization Centers, August 13, 1999, Washington DC, U.S. Department of Energy Workshop, USA
"Variable
Temperature Scanning Tunneling Microscopy Studies on TiN(001) Surface Diffusion
Processes," 5th International Conference on ABS Technology,
Sheffield, United Kingdom, July, 1999
"Microstructural
and Surface Morphological Evolution during Growth of Transition-metal
Nitrides: Role of Low-Energy Ion/Surface Interactions," Department of
Physics, Linköping University, Sweden, November 19, 1998
(PLENARY)
"Overview of Ion-Assisted Thin Film Deposition", Thin Film
Workshop, Vatsdena, Sweden, 12.15.1997
(PLENARY)
"Microstructure and Texture Evolution during Sputter Deposition"
XVII Congress of the Mexican Society of Surface Science and Vacuum,
Mazatlan, Mexico Sept. 1-4, 1997
"Al/TiN and Al/TiW
metal/diffusion barrier systems: interfacial reaction paths and
kinetics" National Research Institute for Metals Tsukuba 305 Japan,
July 7, 1997
"Microstructure
and texture evolution during transition metal nitride growth"
National Research Institute for Metals Tsukuba 305 Japan, July
7-15, 1997
"Epitaxial Growth
of Transition Metal Nitrides on Metal-Ion Etched Ferritic and Austenitic
Steel Substrates," Third International Conference on ABS Technology,
Sheffield, United Kingdom, July, 1997
"Low-Energy
Ion/Surface Interactions During Metal and Diffusion-Barrier Film Growth:
Effects on Nucleation, Microchemistry, Microstructure Evolution, and
Texture," Materials Research Society, San Francisco,
California, USA, April, 1997.
"Low-Temperature
Epitaxial Growth of Semiconductors and Ceramics," American Chemical
Society, San Francisco,
California, USA, April, 1997.
"Atomic-Level
Control of Surface Reaction Pathways During Film Growth Under Highly
Kinetically Constrained Conditions: Materials Processing Strategies to
Meet Future SIA Needs," International Conference on Metallurgical
Coatings and Thin Films, San Diego,
California, USA, April, 1997.
"Fundamental of
Thin Film Growth by Sputter Deposition" Electronics Materials Center,
North Carolina, USA, Feb.26-27,1997
(PLENARY) "Low-Temperature Growth of Transition Metal Nitrides: Effects of Ion Energy and Flux", 10th International Conference on Vacuum Web Coating, November 10-12, 1996, Fort Lauterdale, Florida, USA
"Fundamentals of
Transition Metal Nitride Crystal Growth, 10th International Conference on
Thin Films and 5th European Vacuum Conference, Salamonca, September, 1996,
Spain
"Microstrustructure
and Microchemistry of PVD Interfaces", Second International
Conference on ABS Technology, United Kingdom, July 23-24, 1996
"Fundamentals of Sputter
Deposition" Microelectronic Center of North Carolina, Raleigh, North
Carolina, USA, September, 1996.
"Microstructural
and Microchemical Studies of Model Diffusion Barrier Systems: Interfacial
Metal/Barrier Reaction Paths," SRC Workshop on Cu Interconnects,
Rensselaer Polytechnic Institute, Troy, New York, USA, June, 1996.
"Microstructure of
Interfaces and Multilayer Coatings Prepared by Combined Arc/Magnetron
Deposition Techniques," International Conference on Metallurgical
Coatings and Thin Films, San Diego, California, USA, April, 1996.
"Microstructural Evolution, Defect Structure, and Development of Preferred Orientation during Growth of Transition-Metal Nitride Films," 24th Annual Symposium on Applied Vacuum Science and Technology, March 11-14, 1996, Orlando, Florida, USA
"Microstructure Of
Engineered Interfaces And Multilayered Films Using Combined Arc/Magnetron
Sputter Deposition Processes," International Conference on ABS Technology, Sheffield, United
Kingdom, March 28-30, 1995.
“The Deposition of AlCu
and TiN Films for Microelectronic Applications using Ionized Magnetron Sputter
Deposition," American Vacuum Society 41st National Symposium, Denver,
USA, October, 1994.
"Nb-Containing
(Ti,Al)N Coatings Grown by a Combined Unbalanced- Magnetron/Cathodic-Arc
Deposition Method," International Conf. Metallurigical Coatings and
Thin Films, San Diego, California, USA, April 1994.
Development of Preferred
Orientation during Ion-Assisted Growth, IUVSTA Workshop on Low-Energy
Ion/Surface Interactions during Thin Film Growth, May 16-22, 1993,
Kitzsteinhorn, Austria
Magnetron
Sputter-Deposition of Diamond-like Carbon, The Gillette Company, Boston, Massachusetts, USA, March 27, 1992
Transmission Electron Microscopy Studies of Microstructural Evolution Defect Structure and Phase Transitions in Polycrystalline and Epitaxial Ti1-xAlxN and TiN Films Grown by Reactive Magnetron Deposition, International Conf. on Metallurgical Coatings and Thin Films San Diego, California, USA, April 1991